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Semiconductor Industry

Air abatement system RTO with RL

Semiconductor manufacturers need adsorption concentrators and regenerative – or in the case of smaller processes – recuperative oxidation systems to abate the exhaust air produced in the manufacturing of electronic components.

Processes

Conditions: Semiconductor process exhaust is characterized by dilute air volumes containing gases that are extremely hazardous to production environments.

Abatement System Recommendation: Ecopure® KPR zeolite rotary concentrators coupled with an Ecopure® RTO Regenerative Thermal Oxidizer, the Ecopure® TAR Recuperative Oxidizer, or Ecopure® RL rotary Regenerative Thermal Oxidizer removes VOCs (Volatile Organic Compounds) and HAPs (Hazardous Air Pollutants) at high levels with minimal impact to sensitive wafer tooling processes.

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